Description
WLI (While Light Interferometry) technology combined with a piezo motor allows extremely fast measurements.
The table allows manual movement with workpieces weighing up to 5 kg.Motorized tables are available as an option to extend the X&Y measuring range.
Technical specification
| Specifications | WLI 2.5x | WLI 5x | WLI 10x | WLI 20x | WLI 50x | WLI 100x | |
| Resolution | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | 0.1 nm | |
| Lateral resolution (X/Y) | 4.81 µm | 4.81 µm | 1.2 µm | 0.9 µm | 0.66 µm | 0.52 µm | |
| Measuring range | 400 µm | 400 µm | 400 µm | 400 µm | 400 µm | 400 µm | |
| Measuring range X/Y | ~4536 µm x
~3447 µm |
~2268 µm x
~1723 µm |
~1134 µm x
~861 µm |
~567 µm x
~430 µm |
~226 µm x
~172 µm |
~113 µm x
~86 µm |
|
| Optical Zoom | 2.5x | 5x | 10x | 20x | 50x | 50x | |
| Working distance | ~10.3 mm | ~9.3 mm | ~7.4 mm | ~4.7 mm | ~3.4 mm | ~3.4 mm | |
Z-axis displacement
The Z-axis travel wheel has two functions: quick movement and fine positioning to easily adjust the working distance.
Tilt Adjustment
The tilt adjustment of the table is done using the two knobs on the front of the table.
Mounting Bases
The table’s thumbwheel allows precise movement in X & Y.
Optics
A carousel of optics is available as an option.
