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MAHR MarSurf CM select 3D surface measurement

Tailor-made measurement of surfaces

The MarSurf CM select is a powerful, configurable confocal microscope for the three-dimensional measurement and analysis of surfaces – contactless, independent of material, and fast.

Axes and isolation systems as well as software modules can be combined individually. This allows the measuring system to be adapted to different measuring tasks.

As a multi-sensor system, the MarSurf CM select also offers the possibility of combining different sensor technologies in one measuring device. Depending on the measuring task, the optimal point sensor can also be flexibly selected.

The MarSurf CM select meets your individual requirements for automation, measuring comfort and accuracy – right up to the fully automated measuring solution.

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MarSurf CM select 3D surface measurement

Key benefits:

  • Designed for continuous operation
  • Automation software with industrial interfaces for transfer to QA systems
  • High measuring speed – even at full resolution
  • Individually configurable to your sample size
  • Multi-sensor system
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function, 16-bit
  • Consistent high resolution output of large measuring surfaces due to HD stitching

This established optical measuring system is successfully used, for example, for:

  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the reliability of this measuring system, which provides quantitative, traceable 3D characteristics for many industries.

technical data

up to 2 (nm) vertical
Measuring speed
up to 100fps
Measuring principle
High-performance LED (505 nm / white)
Collision detection in xyz direction
Power supplied
100 – 240 V
Surface parameters
ISO 4287, ISO 13565, ISO 25178, …
Positioning volume x
300 mm
Positioning volume y
300 mm
Positioning volume z
100 mm


Mechanical Engineering

  • To qualify and quantify roughness, geometry and wear volume

Electronics and semiconductors

  • Component inspection down to the sub-micrometer range for defect-free products

Medical Technology

  • Quality assurance of medical surfaces in production and laboratory

Material Science

  • Optimization of functional properties of new surfaces and products

Microsystems Technology

  • Measure complex surface geometries of smallest components with nanometer precision


MarSurf CM mobile

  • Confocal measuring head
  • B/W or Colour camera
  • 4x lens revolver
  • Control electronics integrated in the system
  • Motorized XY table (50×50 mm) with glass scales for positioning and image field merging (“stitching”)
  • Motorized Z-axis (35 mm)
  • Laptop or measuring system computer with 24″ TFT monitor selectable
  • Objective lenses:
  • 5x to 100x selectable
  • MarSurf MSW for intuitive data acquisition
  • MarSurf for professional evaluation, graphical representation and creation of measuring records
  • (choice of Standard, Extended or Premium version)