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MAHR MarSurf CM explorer 3D surface measurement

The flexible, all-round measuring solution

The MarSurf CM explorer is a compact confocal microscope for the three-dimensional measurement and analysis of surfaces – contactless, independent of material, and fast.

The MarSurf CM explorer is suitable for use in test laboratories and equipped for quality assurance in production environments due to its robust construction and insensitivity to environmental influences.

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MarSurf CM explorer 3D surface measurement

Key benefits:

  • High measuring speed – even at full resolution
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function, 16-bit
  • Consistent high resolution output of large measuring surfaces due to HD stitching

This established optical measuring system is successfully used, for example, for:

  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the MarSurf CM explorer as a reliable measuring system that provides quantitative traceable 3D characteristics for many industries .

Technical Data


up to 2 (nm) vertical

Measuring speed

up to 100fps

Measuring principle

High-performance LED (505 nm / white)


Collision detection in xyz direction

Power supplied

100 – 240 V

Surface parameters

ISO 4287, ISO 13565, ISO 25178, …

Positioning volume x

50 mm

Positioning volume y

50 mm

Positioning volume z

70 mm



Mechanical Engineering

  • To qualify and quantify roughness, geometry and wear volume

Electronics and semiconductors

  • Component inspection down to the sub-micrometer range for defect-free products

Medical Technology

  • Quality assurance of medical surfaces in production and laboratory

Material Science

  • Optimization of functional properties of new surfaces and products

Microsystems Technology

  • Measure complex surface geometries of smallest components with nanometer precision


MarSurf CM explorer

  • Confocal measuring head
  • HDR camera (B/W or color camera)
  • 4x lens revolver with identification
  • L-tripod including control electronics
  • Motorized XY table (50×50 mm) with glass scales for sample positioning and image field merging (“stitching”)
  • Motorized Z-axis (70 mm) with glass measuring scale
  • Measuring system computer with 24″ TFT monitor
  • Objective lenses:
  • 5x to 100x selectable
  • MarSurf MSW for intuitive data acquisition
  • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records
  • (choice of Standard, Extended or Premium version)