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MAHR MarSurf CM expert 3D surface measurement

The flexible, all-round measuring solution

The MarSurf CM explorer is a compact confocal microscope for the three-dimensional measurement and analysis of surfaces – contactless, independent of material, and fast.

The MarSurf CM explorer is suitable for use in test laboratories and equipped for quality assurance in production environments due to its robust construction and insensitivity to environmental influences.

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MarSurf CM expert 3D surface measurement

Key benefits:

  • User-independent serial measurements by automation software
  • High measuring speed – even at full resolution
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function, 16-bit
  • Consistent high resolution output of large measuring surfaces due to HD stitching

This established optical measuring system is successfully used, for example, for:

  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the reliability of this measuring system, which provides quantitative, traceable 3D characteristics for many industries .

Technical Data

up to 2 (nm) vertical
Measuring speed
up to 100fps
Measuring principle
High-performance LED (505nm / white)
Collision detection in xyz direction
Power supplied
100 – 240 V
Surface parameters
ISO 4287, ISO 13565, ISO 25178, …
Positioning volume x
100 mm
Positioning volume y
100 mm
Positioning volume z
70 mm



Mechanical Engineering

  • To qualify and quantify roughness, geometry and wear volume

Electronics and semiconductors

  • Component inspection down to the sub-micrometer range for defect-free products

Medical Technology

  • Quality assurance of medical surfaces in production and laboratory

Material Science

  • Optimization of functional properties of new surfaces and products

Microsystems Technology

  • Measure complex surface geometries of smallest components with nanometer precision


MarSurf CM expert

  • Confocal measuring head
  • HDR camera (B/W or color camera)
  • 4x lens revolver with identification
  • L-tripod including control electronics
  • Motorized XY table (100×100 mm) with glass scales for sample positioning and image field merging (“stitching”)
  • Motorized Z-axis (70 mm) with glass measuring scale
  • Measuring system computer with 24″ TFT monitor
  • Objective lenses:
  • 5x to 100x selectable
  • MarSurf MSW for intuitive data acquisition
  • MarSurf ASW for automation (optional)
  • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records
  • (choice of Standard, Extended or Premium version)